Study of temperature rise during focused Ga ion beam irradiation using nanothermo-probe

Applied Surface Science

Volumn 256, Issue 2, 2009, Pages 475-479

  Shukla, Neeraj ^a   Tripathi, Sarvesh K ^a   Banerjee, Amit ^a   Ramana, A Sai Venkata ^a   Rajput, Nitul S ^a   Kulkarni, Vishwas N ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY KANPUR   (India)

Author keywords

Focused ion beam; Nanostructure fabrication; Nanothermocouple; SEM

Indexed keywords

BINARY ALLOYS; FOCUSED ION BEAMS; GALLIUM; HEAT TRANSFER; ION BOMBARDMENT; IONS; KINETIC ENERGY; KINETICS; MICROMACHINING; MIM DEVICES; PLATINUM ALLOYS; SCANNING ELECTRON MICROSCOPY; TUNGSTEN ALLOYS;

ELECTRONIC EXCITATION; ENERGY DEPOSITIONS; ESTIMATION OF TEMPERATURES; FOCUSED ION BEAM CHEMICAL VAPOR DEPOSITION; LASER AND ELECTRON BEAMS; NANOSTRUCTURE FABRICATION; NANOTHERMOCOUPLE; THERMAL CHARACTERIZATION;

CHEMICAL VAPOR DEPOSITION;

EID: 70449123810     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2009.07.024     Document Type: Article

References (22)

1. Parka Y.M., Koa D.S., Yia K.W., Petrovb I., and Kim Y.W. Ultramicroscopy 107 (2007) 663
2. Peach D.F., Lane D.W., and Sellwood M.J. Nucl. Instrum. Methods B 249 (2006) 677
3. Tripathi S.K., Shukla N., Dhamodaran S., and Kulkarni V.N. Nanotechnology 19 (2008) 205302
4. Tripathi S.K., Shukla N., and Kulkarni V.N. Nanotechnology 19 (2008) 465302
5. Shukla N., Tripathi S.K., Sarkar M., Rajput N.S., and Kulkarni V.N. Nucl. Instrum. Methods B 267 (2009) 1376
6. Wie C.R., Shi C.R., Mendenhall M.H., Livi R.P., Vreeland Jr. T., and Tombrello T.A. Nucl. Instrum. Methods B 9 (1985) 20
7. Sood D.K., and Baglin J.E.E. Nucl. Instrum. Methods B 19/20 (1987) 954
8. Melngailis J. J. Vac. Sci. Technol B5 (1987) 469
9. Ishitani T., and Kaga H. J. Electron. Microsc. 44 (1995) 331
10. Reyntjens S., and Puers R. J. Micromech. Microeng. 11 (2001) 287
11. Tseng A.A. J. Micromech. Microeng. 14 (2004) R15
12. Arscott S., and Troadec D. Nanotechnology 16 (2005) 2295
13. Wu S.E., Liu C.P., Hsueh T.H., Chung H.C., Wang C.C., and Wang C.Y. Nanotechnology 18 (2007) 445301
14. Wu J., Eastman M., Gutu T., Wyse M., Jiaoa J., Kim S.M., Mann M., Zhang Y., and Teo K.B.K. Appl. Phys. Lett. 91 (2007) 173122
15. Callegaria V., Nellen P.M., Kaufmann J., Strasser P., Robin F., and Sennhauser U. J. Vac. Sci. Technol. B 25 (2007) 2175
16. Orloff J., Utlaut M., and Swanson L. High Resolution Focused Ion Beams: FIB and its Applications (2003), Kluwer Academic/Plenum Publishers, New York
17. Kinzie P.A. Thermocouple Temperature Measurement (1973), Willey Interscience Publication, New York (chapter 4, pp. 161)
18. Tripathi S.K., Shukla N., and Kulkarni V.N. Nucl. Instrum. Methods B 266 (2008) 1468
19. Dearnaley G., Freeman J.H., Nelson R.S., and Stephen J. Ion Implantation (1973), North-Holland, Amsterdam (chapter 4)
20. Ziegler J.F. Nucl. Instrum. Methods B 219-220 (2004) 1027
21. S.K. Tripathi, N. Shukla, N.S. Rajput, S Dhamodaran, Vishwas N Kulkarni, Fabrication of nano-mechanical switch using focused ion beam for complex nano electronic circuits (communicated).
22. Langford R.M., Wang T.-X., and Ozkaya D. Microelectron. Eng. 84 (2007) 784