Effects of SrF2 phase on electrical properties of SrTiO3 thin films deposited by plasma-enhanced metalorganic chemical vapor deposition

Integrated Ferroelectrics

Volumn 14, Issue 1-4, 1997, Pages 105-113

  Kim, Nam Kyeong ^a   Yoon, Soon Gil ^a   Lee, Won Jae ^b   Kim, Ho Gi ^b  

^a Chungnam National University   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; ELECTRIC FIELD EFFECTS; LEAKAGE CURRENTS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PERMITTIVITY; STRONTIUM COMPOUNDS; THIN FILMS;

PLASMA ENHANCED METALLORGANIC CHEMICAL VAPOR DEPOSITION (PEMOCVD); SCHOTTKY EMISSION;

DIELECTRIC FILMS;

EID: 7044231967     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589708019982     Document Type: Article

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