Piezoresistive microphone with integrated amplifier realized using metal-induced laterally crystallized polycrystalline silicon

Journal of Micromechanics and Microengineering

Volumn 14, Issue 10, 2004, Pages 1352-1358

  Li, Gang ^a   Zohar, Yitshak ^a   Wong, Man ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLIFIERS (ELECTRONIC); FREQUENCY RESPONSE; HIGH TEMPERATURE EFFECTS; MICROPHONES; RECRYSTALLIZATION (METALLURGY); SENSITIVITY ANALYSIS; SENSORS; SINGLE CRYSTALS;

INTEGRATED AMPLIFIERS; MICRO-SYSTEMS; NOISE LEVEL; PIEZORESISTIVE MICROPHONES;

POLYSILICON;

EID: 7044231321     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/10/009     Document Type: Article

References (13)

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