Precise displacement measurement for a local surface

Optics Letters

Volumn 34, Issue 21, 2009, Pages 3406-3408

  Yeh, Sheng Lih ^a   Lin, Shyh Tsong ^b   Chang, Yu Hsin ^a  

^a LUNGHWA UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^b NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL DATA PROCESSING;

AVERAGE ERRORS; INTERFERENCE FRINGE; LOCAL SURFACES; LOW COSTS; OPTICAL MEASUREMENT METHODS; OUT-OF-PLANE DISPLACEMENT; SCATTERED BEAMS;

DISPLACEMENT MEASUREMENT;

EID: 70350629898     PISSN: 01469592     EISSN: 15394794     Source Type: Journal    
DOI: 10.1364/OL.34.003406     Document Type: Article

References (8)

1. C. M. Vest (Wiley, 1979).
2. K. J. Gasvik, Optical Metrology, 3rd ed. (Wiley, 2002).
3. Y. Y. Cheng and J. C. Wyant, Appl. Opt. 24, 804 (1985).
4. K. Creath, Appl. Opt. 24, 3053 (1985).
5. T. Kreis, Holographic Interferometry: Principles and Methods (Akademie Verlag, 1996).
6. F. G. Cervants, G. Heinzel, A. F. G. Marin, V. Wand, F. Steier, O. Jennrich, and K. Danzmann, Appl. Opt. 46, 4541 (2007).
7. Y. Bitou, Appl. Opt. 47, 6219 (2008).
8. M. Francon, Laser Speckle and Applications in Optics (Academic, 1979).