Thin-film processing realities for Tbit/in2 recording

IEEE Transactions on Magnetics

Volumn 44, Issue 11 PART 2, 2008, Pages 3617-3620

  Fontana, Robert E ^a   Robertson, Neil ^a   Hetzler, Steven R ^b  

^a HITACHI AMERICA LTD   (United States)

^b IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

Inductive heads; Photolithography; Thin film processing

Indexed keywords

ENTERTAINMENT INDUSTRY; MAGNETIC RECORDING; MAGNETIC STORAGE; MAGNETIC THIN FILM DEVICES; PHOTOLITHOGRAPHY; SEMICONDUCTOR DEVICE MANUFACTURE;

AREAL DENSITIES; HEAD STRUCTURE; INDUCTIVE HEADS; LITHOGRAPHIC DIMENSIONS; SEMICONDUCTOR INDUSTRY; SOLID-STATE STORAGE; THIN FILM HEADS; THIN-FILM PROCESSING;

THIN FILMS;

EID: 70350613579     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2008.2002532     Document Type: Article

References (5)

1. ITRS, 2007 ITRS Lithographic Projections. (2007) [Online]. Available: www.itrs.org
2. R. Wood, J. Miles, and T. Olsen, "Recording technologies for terabit per square inch systems", IEEE Trans. Magn., vol. 38, no. 4, pp. 1711-1718, July 2002.
3. M. Mallary, A. Torabi, and M. Benakli, "One terabit per square inch perpendicular recording conceptual design", IEEE Trans. Magn., vol. 38, no. 4, pp. 1719-1724, July 2002.
4. M. Kryder and R. Gustafson, "High density perpendicular recording-Advances, issues, and extensibility", J. Magnetism Magn. Mat., vol. 287, pp. 449-458, 2005.
5. R. Fontana and S. Hetzler, "Magnetic memory devices: Minimum feature and memory hierarchy discussion", J. Appl. Phys., vol. 99, no. 8, pt. III, pp. 08N901-1-08N901-6, Apr. 2006.