Metal-insulator-semiconductor BaTiO3 humidity sensor

2009 Symposium on Photonics and Optoelectronics, SOPO 2009

Volumn , Issue , 2009, Pages

  Wu, Yingcai ^a   Gu, Zhengtian ^b  

^a GUANGDONG OCEAN UNIVERSITY   (China)

^b UNIVERSITY OF SHANGHAI FOR SCIENCE AND TECHNOLOGY   (China)

Author keywords

Adsorption; BaTiO3 thin film; Humidity sensor; Mathematic mode

Indexed keywords

BATIO3 THIN FILM; CHEMICAL ADSORPTION; HUMIDITY CHARACTERISTICS; MATHEMATIC MODE; METAL INSULATOR SEMICONDUCTOR STRUCTURES; METAL-INSULATOR-SEMICONDUCTORS; OPERATING VOLTAGE; OPTICAL LITHOGRAPHY; PHYSICAL ADSORPTION; RADIO FREQUENCY MAGNETRON SPUTTERING; RELATIVE HUMIDITIES; RELATIVE HUMIDITY RANGE; SILICON SUBSTRATES; SIMPLE MODEL;

ADSORPTION; ALUMINA; BARIUM COMPOUNDS; CAPACITANCE; HUMIDITY SENSORS; METAL INSULATOR BOUNDARIES; MIS DEVICES; MOISTURE; PHOTOLITHOGRAPHY; SEMICONDUCTOR INSULATOR BOUNDARIES; THIN FILM DEVICES; THIN FILMS;

ATMOSPHERIC HUMIDITY;

EID: 70350493177     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SOPO.2009.5230200     Document Type: Conference Paper

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