Optical properties of hexagonal boron nitride thin films deposited by radio frequency bias magnetron sputtering

Chinese Physics B

Volumn 18, Issue 9, 2009, Pages 4013-4018

  Deng, Jin Xiang ^a   Zhang, Xiao Kang ^a,b   Yao, Qian ^b   Wang, Xu Yang ^a   Chen, Guang Hua ^a   He, De Yan ^b  

^a BEIJING UNIVERSITY OF TECHNOLOGY   (China)

^b LANZHOU UNIVERSITY   (China)

Author keywords

Hexagonal boron nitride films; Optical properties; Sputtering; UV visible

Indexed keywords

ANNEALED FILMS; AS-DEPOSITED FILMS; BLUE SHIFT; BN FILMS; HEXAGONAL BORON NITRIDE; HEXAGONAL BORON NITRIDE (H-BN); HEXAGONAL BORON NITRIDE FILMS; HIGH TEMPERATURE; OPTICAL ABSORPTION; OPTICAL ABSORPTION EDGE; OPTICAL ABSORPTION PROPERTIES; POST DEPOSITION ANNEALING; RADIO FREQUENCIES; RADIO FREQUENCY BIAS; STRUCTURE STABILITY; URBACH TAIL; UV-VISIBLE; VISIBLE AND ULTRAVIOLET;

ABSORPTION; AMORPHOUS FILMS; ANNEALING; BORON; BORON NITRIDE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LIGHT ABSORPTION; LIGHT REFRACTION; MAGNETRONS; NITRIDES; OPTICAL CONDUCTIVITY; RADIO; RADIO WAVES; REFRACTIVE INDEX; REFRACTOMETERS; SINGLE CRYSTALS; SPECTROSCOPIC ANALYSIS; SPECTROSCOPY; THIN FILMS;

OPTICAL FILMS;

EID: 70350449428     PISSN: 16741056     EISSN: None     Source Type: Journal    
DOI: 10.1088/1674-1056/18/9/066     Document Type: Article

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