Nanoindentation and scratch studies on magnetron sputtered Ti thin films

Journal of Nanoscience and Nanotechnology

Volumn 9, Issue 9, 2009, Pages 5476-5479

  Kataria, S ^a   Ramaseshan, R ^a   Dash, S ^a   Tyagi, A K ^a  

^a INDIRA GANDHI CENTRE FOR ATOMIC RESEARCH   (India)

Author keywords

Acoustic emission; Atomic force microscope; Frictional force; Hardness; Nanoindentation; Scratch test

Indexed keywords

ADHESION STRENGTHS; ATOMIC FORCE MICROSCOPE; CRITICAL LOAD; FILM HARDNESS; FRICTIONAL FORCE; MECHANICAL BEHAVIOR; SCRATCH TEST; SLIDING CONTACTS; SUBSTRATE TEMPERATURE; TI THIN FILMS;

ACOUSTIC EMISSIONS; ACOUSTICS; COATINGS; FRICTION; HARDNESS; NANOINDENTATION; THIN FILMS;

ACOUSTIC EMISSION TESTING;

EID: 70350306480     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2009.1174     Document Type: Conference Paper

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