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Volumn 22, Issue 2, 2009, Pages 249-251
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Plasma polymer thin films with controlled topography and chemistry at the nanoscale
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Author keywords
DUV lithography; Nanopatterning; Plasma polymer
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Indexed keywords
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EID: 70350168086
PISSN: 09149244
EISSN: 13496336
Source Type: Journal
DOI: 10.2494/photopolymer.22.249 Document Type: Article |
Times cited : (2)
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References (6)
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