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Volumn 34, Issue 1, 2010, Pages 34-42

Dynamic characteristics and dual control of a ball screw drive with integrated piezoelectric actuator

Author keywords

Ball screw drive; Dual servo control; Piezoelectric actuator; Precision positioning

Indexed keywords

BALL SCREW DRIVE; BALL-SCREW DRIVES; CONTROL PARAMETERS; DRIVE MECHANISM; DRIVE SYSTEMS; DUAL CONTROL; DUAL SERVO CONTROL; DYNAMIC CHARACTERISTICS; MOTION CONTROLLER; PATH TRACKING CONTROL; PRECISION POSITIONING; SIMULATION MODEL; SINGLE STAGE; TRACKING ERRORS;

EID: 70350126949     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2009.01.007     Document Type: Article
Times cited : (27)

References (14)
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  • 2
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  • 7
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    • An ultraprecision stage for alignment of wafers in advanced microlithography
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  • 8
    • 0343441536 scopus 로고    scopus 로고
    • Ultra precision positioning system for servo motor piezo actuator using the dual servo loop and digital filter implementation
    • Pahk J.H., Lee S.D., and Park J.H. Ultra precision positioning system for servo motor piezo actuator using the dual servo loop and digital filter implementation. International Journal of Machine Tools & Manufacture 41 (2001) 51-63
    • (2001) International Journal of Machine Tools & Manufacture , vol.41 , pp. 51-63
    • Pahk, J.H.1    Lee, S.D.2    Park, J.H.3
  • 9
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    • Piezoelectric tool actuator for precision machining on conventional CNC turning centers
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  • 11
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    • A ballscrew drive mechanism with piezo-electric nut for preload and motion control
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    • Chen, S.J.1    Dwang, C.I.2
  • 12
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    • Development of small ultraprecision displacement sensor and small ultraprecision positioning device with 1 nm resolution
    • [in Japanese]
    • Otsuka J., Ichikawa S., and Yamaguchi Y. Development of small ultraprecision displacement sensor and small ultraprecision positioning device with 1 nm resolution. Journal of the Japan Society of Precision Engineering 69 10 (2003) 1428-1433 [in Japanese]
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  • 13
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.