A new, high precision, quick response pressure regulator for active control of pneumatic vibration isolation tables

Precision Engineering

Volumn 34, Issue 1, 2010, Pages 43-48

  Kato, Tomonori ^a   Kawashima, Kenji ^b   Funaki, Tatsuya ^c   Tadano, Kotaro ^b   Kagawa, Toshiharu ^b  

^a TOKYO METROPOLITAN COLLEGE OF INDUSTRIAL TECHNOLOGY   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^c NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Pressure control; Pressure differential sensor; Pressure regulator; Vibration isolation table

Indexed keywords

ACTIVE CONTROL; HIGH PRECISION; ISOTHERMAL CHAMBER; PNEUMATIC PRESSURE; PNEUMATIC SYSTEM; PRESSURE DIFFERENTIAL; PRESSURE DIFFERENTIAL SENSOR; QUICK RESPONSE; QUICK RESPONSE LAMINAR FLOW SENSORS; SERVO-VALVE; SUPPLY PRESSURE; VIBRATION ISOLATION TABLE; VIBRATION ISOLATIONS; VIBRATION ISOLATORS;

ANTIVIBRATION MOUNTINGS; CONTROL SYSTEM ANALYSIS; LAMINAR FLOW; PNEUMATIC SERVOMECHANISMS; PNEUMATICS; PRESSURE REGULATION; SENSORS;

PRESSURE REGULATORS;

EID: 70350124924     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2009.01.008     Document Type: Article

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