Analysis and modeling of a silicon nitride slot-waveguide microring resonator biochemical sensor

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7356, Issue , 2009, Pages

  Barrios, Carlos Angulo ^a  

^a UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

Author keywords

Device modeling; Integrated optics; Optical sensors; Silicon photonics

Indexed keywords

ANALYSIS AND MODELING; ANALYTES; AQUEOUS SOLUTIONS; BIO-CHEMICAL SENSOR; BIOMOLECULAR LAYERS; DEVICE MODELING; FINITE-DIFFERENCE BEAM PROPAGATION METHOD; MICRORINGS; NANO SCALE; NUMERICAL CALCULATION; OPTICAL MODELS; POWER COUPLING; RESONATOR COUPLING; SEMIVECTORIAL; SILICON PHOTONICS; SURFACE ETCHING; SURFACE SENSING; SURFACE SENSITIVITY; WAVEGUIDE MICRORING RESONATOR; WAVEGUIDE SENSORS;

ADHESION; ETCHING; INTEGRATED OPTICS; NUMERICAL METHODS; OPTICAL MATERIALS; OPTICAL RESONATORS; PHOTONIC DEVICES; PHOTONICS; SILICON NITRIDE; WAVEGUIDES;

OPTICAL SENSORS;

EID: 70350049237     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.820172     Document Type: Conference Paper

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