Molecular dynamics simulations of the roller nanoimprint process: Adhesion and other mechanical characteristics

Nanoscale Research Letters

Volumn 4, Issue 8, 2009, Pages 913-920

  Wu, Cheng Da ^a   Lin, Jen Fin ^a   Fang, Te Hua ^b  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b NATIONAL FORMOSA UNIVERSITY   (Taiwan)

Author keywords

Molecular dynamics; Nanoimprint; Nanotribology; Roller imprint; Taper

Indexed keywords

FORCE CURVE; HIGH STRESS; IMPRINT MECHANISMS; IMPRINT TEMPERATURE; MANY-BODY POTENTIALS; MECHANICAL CHARACTERISTICS; MOLECULAR DYNAMICS SIMULATIONS; NANOIMPRINT; NANOIMPRINT PROCESS; ROLLER IMPRINT; STRESS DISTRIBUTION; SUBSTRATE ATOM; TAPER; TAPER ANGLES; TIGHT BINDING; TWO STAGE;

ADHESION; MOLDS; MOLECULAR DYNAMICS; NANOTRIBOLOGY; SINGLE CRYSTALS; STRESS CONCENTRATION; UNLOADING; VIBRATIONS (MECHANICAL);

ROLLERS (MACHINE COMPONENTS);

EID: 70349979700     PISSN: 19317573     EISSN: 1556276X     Source Type: Journal    
DOI: 10.1007/s11671-009-9330-x     Document Type: Article

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