Replication of high ordered nano-sphere array by nanoimprint lithography

Microelectronic Engineering

Volumn 86, Issue 12, 2009, Pages 2423-2426

  Hong, Sung Hoon ^a   Bae, Byeong Ju ^a   Hwang, Jae Yeon ^a   Hwang, Seon Yong ^a   Lee, Heon ^a  

^a Korea University   (South Korea)

Author keywords

DLC coating; Flexible polymer template; Hot embossing; UV nanoimprint lithography

Indexed keywords

DLC COATING; EVAPORATION METHOD; FLEXIBLE POLYMER TEMPLATE; HOT EMBOSSING; PET SUBSTRATE; POLYMER REPLICA; POLYMER TEMPLATES; SI SUBSTRATES; SPHERE ARRAY; UV NANOIMPRINT LITHOGRAPHY; VINYL CHLORIDES;

CHLORINE COMPOUNDS; FABRICATION; MONOLAYERS; NANOSPHERES; PLASTIC COATINGS; POLYETHYLENE TEREPHTHALATES; POLYMERS; POLYVINYL CHLORIDES; SPHERES;

NANOIMPRINT LITHOGRAPHY;

EID: 70349769297     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.05.005     Document Type: Article

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