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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 5, 2009, Pages 2286-2291

Film-thickness dependence of 10 GHz Nb coplanar-waveguide resonators

(5) Inomata, Kunihiro a Yamamoto, Tsuyoshi a,b Watanabe, Michio a,d Matsuba, Kazuaki c Tsai, Jaw Shen a,b

a RIKEN (Japan)

b NEC CORPORATION (Japan)

c TOKYO INSTITUTE OF TECHNOLOGY (Japan)

d Fort Lupton Fire Protection District (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BASE TEMPERATURE; CENTER CONDUCTORS; CIRCUIT SIMULATORS; EXPERIMENTAL DATA; INPUT/OUTPUT; KINETIC INDUCTANCES; LOADED QUALITY FACTOR; RESONANT FREQUENCIES; SCATTERING MATRICES; TEMPERATURE DEPENDENCE; THEORETICAL PREDICTION; TRANSMISSION COEFFICIENTS; WAVEGUIDE RESONATORS;

CIRCUIT SIMULATION; CURVE FITTING; INDUCTANCE; MAGNETIC FILMS; NATURAL FREQUENCIES; NIOBIUM; WAVEGUIDES;

RESONATORS;

EID: 70349705883 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.3232301 Document Type: Article

Times cited : (6)

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