A new design methodology for electro-mechanical sigma-delta-modulators

4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009

Volumn , Issue , 2009, Pages 881-884

  Luo, Jian ^a   Ding, Haitao ^a   Kraft, Michael ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

Force Feedback; MEMS accelerometer; Sigma delta modulation ((SDM); Systematic design

Indexed keywords

ANALOG-TO-DIGITAL; BULK-MICROMACHINED; CAPACITIVE ACCELEROMETERS; ELECTRO-MECHANICAL; FORCE FEEDBACK; HIGH RESOLUTION; MEMS ACCELEROMETER; MICROELECTROMECHANICAL SYSTEMS; MICROMACHINED; NEW DESIGN; SENSING ELEMENTS; SIGMA-DELTA; SIGMA-DELTA MODULATION ((SDM); SYSTEM LEVELS; SYSTEMATIC DESIGN; SYSTEMATIC DESIGNS; SYSTEMATIC METHOD;

ACCELEROMETERS; COMPOSITE MICROMECHANICS; DESIGN; MEMS; MICROELECTROMECHANICAL DEVICES; MODULATORS; SPACE DIVISION MULTIPLE ACCESS;

DELTA SIGMA MODULATION;

EID: 70349683216     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2009.5068715     Document Type: Conference Paper

References (7)

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