Optimization of corona-triggered PDMS-PDMS bonding method

4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009

Volumn , Issue , 2009, Pages 319-322

  Yang, Chenying ^a   Wang, Wei ^b   Li, Zhihong ^b  

^a PEKING UNIVERSITY HEALTH SCIENCE CENTER   (China)

^b INSTITUTE OF MICROELECTRONICS   (China)

Author keywords

Contact angle; Corona; Microfluidics; PDMS to PDMS bonding

Indexed keywords

BONDING STRENGTH; BONDING TECHNIQUES; CONTACT ANGLE ANALYSIS; CORONA; CURING CONDITION; EXPOSURE-TIME; HIGHLY-PORTABLE; HYDROPHOBIC RECOVERY; MICROFLUIDIC CHIP; MINIMUM FEATURE SIZES; OXYGEN PLASMAS; PDMS BONDING; PDMS CHIPS; PDMS SURFACES; PDMS TO PDMS BONDING;

BIOCHIPS; CONTACT ANGLE; CURING; DIFFUSION BONDING; HYDROPHOBICITY; MICROFLUIDICS; OPTIMIZATION; OXYGEN; SILICONES;

MICROCHANNELS;

EID: 70349672871     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2009.5068586     Document Type: Conference Paper

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