Micro-contact printing of OTFT on polymer foils

Proceedings - Electronic Components and Technology Conference

Volumn , Issue , 2009, Pages 1322-1324

  König, Martin ^a   Bock, Karlheinz ^a   Klink, Gerhard ^a  

^a Fraunhofer Institute Reliability and Microintegration   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BOTTOM GATE; CHANNEL LENGTH; CRITICAL DIMENSION; DEEP ETCHING; DISPLAY SYSTEM; ELECTRICAL MEASUREMENT; ETCHING OF METALS; FLEXIBLE ELECTRONICS; FLEXIBLE SYSTEM; FUTURE APPLICATIONS; GATE ELECTRODES; HIGH RESOLUTION; INDUSTRIAL MANUFACTURING PROCESS; LABORATORY CONDITIONS; LARGE-AREA ELECTRONICS; MICRO CONTACT PRINTING; ORGANIC DEVICES; POLYMER FOIL; POLYMER SUBSTRATE; POLYMER TRANSISTORS; REACTIVE ION; SHORT-CHANNEL EFFECT; SOURCE-DRAIN ELECTRODES; STAMPING PROCESS; SUBMICRON DIMENSION; TOP GATE;

CYANIDES; FIELD EFFECT TRANSISTORS; MOLDING; PHOTORESISTS; PLASTIC COATINGS; POLYIMIDES; POLYMERS; PRINTING; PROTECTIVE COATINGS; REACTIVE ION ETCHING; REFRACTORY METAL COMPOUNDS; SILICONES; STAMPING; SUBSTRATES; SURFACE ROUGHNESS;

SURFACE DEFECTS;

EID: 70349670722     PISSN: 05695503     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ECTC.2009.5074183     Document Type: Conference Paper

References (3)

1. Xia Y., Whitesides G.M., soft lithography., Annu. Rev. Mater. Sci., 28, 1998 (Pubitemid 128631417)
2. M.D.Austin, S.Y.Chouw, APL, Vol.81, 23, 2002
3. M. Leufgen, U. Bass, T. Muck, Optimized sub-micron organic thin-film transistors: the influence of contacts and oxide thickness, Synthetic Metals 146 (2004) 341-345