Parallel numerical solution of the boltzmann equation for atomic layer deposition

Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)

Volumn 2400, Issue , 2002, Pages 452-456

  Webster, Samuel G ^a   Gobbert, Matthias K ^a   Remacle, Jean François ^b   Cale, Timothy S ^b  

^a UNIVERSITY OF MARYLAND BALTIMORE COUNTY   (United States)

^b RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITION; GALERKIN METHODS; GAS DYNAMICS;

DISCONTINUOUS GALERKIN METHODS; INDUSTRIAL MANUFACTURING; LINEAR HYPERBOLIC EQUATION; NUMERICAL SOLUTION; PARALLEL COMPUTATION; SEMICONDUCTOR CHIPS; THREE-DIMENSIONAL MODEL;

BOLTZMANN EQUATION;

EID: 70349622093     PISSN: 03029743     EISSN: 16113349     Source Type: Book Series    
DOI: 10.1007/3-540-45706-2_61     Document Type: Conference Paper

References (9)

1. C. Cercignani. The Boltzmann Equation and Its Applications, volume 67 of Applied Mathematical Sciences. Springer-Verlag, 1988.
2. B. Cockburn, G. E. Karniadakis, and C.-W. Shu, editors. Discontinuous Galerkin Methods: Theory, Computation and Applications, volume 11 of Lecture Notes in Computational Science and Engineering. Springer-Verlag, 2000.
3. K. Devine, B. Hendrickson, E. Boman, M. St. John, and C. Vaughan. Zoltan: A Dynamic Load-Balancing Library for Parallel Applications; User’s Guide. Technical report, Sandia National Laboratories Tech. Rep. SAND99-1377, 1999.
4. M. K. Gobbert and T. S. Cale. Afeature scale transport and reaction model for atomic layer deposition. In M. T. Swihart, M. D. Allendorf, and M. Meyyappan, editors, Fundamental Gas-Phase and Surface Chemistry of Vapor-Phase Deposition II, volume 2001-13, pages 316–323. The Electrochemical Society Proceedings Series, 2001.
5. M. K. Gobbert, J.-F. Remacle, and T. S. Cale. Asp ectral Galerkin ansatz for the deterministic solution of the Boltzmann equation on irregular domains. In preparation.
6. M. K. Gobbert, S. G. Webster, and T. S. Cale. Transient adsorption and desorption in micron scale features. J. Electrochem. Soc., in press.
7. J.-F. Remacle, J. Flaherty, and M. Shephard. An adaptive discontinuous Galerkin technique with an orthogonal basis applied to Rayleigh-Taylor flow instabilities. SIAM J. Sci. Comput., accepted.
8. K. Schloegel, G. Karypis, and V. Kumar. Multilevel diffusion algorithms for repartitioning of adaptive meshes. Journal of Parallel and Distributed Computing, 47:109–124, 1997.
9. S. G. Webster, M. K. Gobbert, and T. S. Cale. Transient 3-D/3-D transport and reactant-wafer interactions: Adsorption and desorption. The Electrochemical Society Proceedings Series, accepted.