Direct observation of single bubble cavitation damage for MHz cleaning

Solid State Phenomena

Volumn 145-146, Issue , 2009, Pages 3-6

  Tomita, Hiroshi ^a   Inukai, Minako ^a   Umezawa, Kaori ^a   Ji, Linan ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

Cavitation; Damage; Light point defect; Physical force

Indexed keywords

DEFECTS; POINT DEFECTS; SONOCHEMISTRY; SURFACE CHEMISTRY;

ALUMINUM FILM; BACK END OF LINES; CAVITATION DAMAGE; DAMAGE SIZE; DIRECT OBSERVATION; FRONT END OF LINES; GATE STRUCTURE; HIGH ENERGY; LIGHT POINT DEFECTS; MEGASONICS; PARTICLE REMOVAL; PATTERN DAMAGES; PHYSICAL FORCE; RESIST FILMS; SCALING DOWN; SINGLE BUBBLES; WAFER SURFACE; DAMAGE; DIRECT OBSERVATIONS; GATE PATTERNS;

CAVITATION;

EID: 70349607771     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/SSP.145-146.3     Document Type: Conference Paper

References (1)

1. C.De Marco, K.Wostyn, T.Bearda, K.-I.Sano, K.Kenis, T.Janssens, L.H.A.Leunissen, A.Eitoku and P.W.Mertens, ECS Transactions 2007, Vol. 11(2), p.87.