Fundamental understanding and modeling of spin coating process: A review

Indian Journal of Physics

Volumn 83, Issue 4, 2009, Pages 493-502

  Sahu, Niranjan ^a   Parija, B ^a   Panigrahi, S ^a  

^a NATIONAL INSTITUTE OF TECHNOLOGY   (India)

Author keywords

Film thickness; Non Newtonian fluids; Shear stress; Spin coating

Indexed keywords

EID: 70349456784     PISSN: 09731458     EISSN: None     Source Type: Journal    
DOI: 10.1007/s12648-009-0009-z     Document Type: Conference Paper

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