Ablation of polymer foils for backside opening of thin film layered flexible polymer substrates

Applied Surface Science

Volumn 255, Issue 24, 2009, Pages 9869-9872

  Zimmer, K ^a   Bohme R ^a   Stephan, T ^a   Scheit, C ^b   Braun, A ^b  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

^b Solarion AG   (Germany)

Author keywords

Blind hole; Kapton; Laser ablation; Thin film

Indexed keywords

ABLATION; FLEXIBLE ELECTRONICS; LASER ABLATION; LASER BEAMS; METALLIC FILMS; POLYIMIDES; THIN FILMS; ULTRAVIOLET LASERS;

BLIND HOLES; ELECTRICAL CONTACTS; FLEXIBLE CIRCUIT BOARDS; FLEXIBLE POLYMER SUBSTRATES; INFLUENCE OF PROCESS PARAMETERS; KAPTON; MOLYBDENUM METALS; THEORETICAL ESTIMATION;

PULSED LASERS;

EID: 70349448337     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2009.04.109     Document Type: Article

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