Fabrication of a n-type ZnO/p-type Cu-Al-O heterojunction diode by sputtering deposition methods

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 6, Issue 5, 2009, Pages 1105-1108

  Takahata, Satoru ^a   Saiki, Keita ^a   Imao, Takashi ^a   Nakanishi, Hisayuki ^a   Sugiyama, Mutsumi ^a   Chichibu, Shigefusa F ^b  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION METHODS; FORWARD VOLTAGE; HETEROJUNCTION DIODES; NEAR INFRARED REGION; P-TYPE; PLASMA SPUTTERING; POLYCRYSTALLINE FILM; RF SPUTTERING METHOD; SPUTTERING DEPOSITION; TRANSPARENT CONDUCTING OXIDE FILMS; ZNO FILMS;

ALUMINUM; CURRENT VOLTAGE CHARACTERISTICS; DISTILLATION; HETEROJUNCTIONS; SEMICONDUCTOR DIODES; ZINC OXIDE;

COPPER;

EID: 70349432647     PISSN: 18626351     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssc.200881167     Document Type: Conference Paper

References (18)

1. H. Kawazoe, M. Yasukawa, H. Hyodo, M. Kurita, H. Ya-nagi, and H. Hosono, Nature 389, 939 (1997).
2. H. Yanagi, S. Inoue, K. Ueda, H. Kawazoe, and H. Hosono, J. Appl. Phys. 88, 4159 (2000).
3. J. H. Shy and B. H. Tseng, J. Phys. Chem. Solids 66, 2123 (2005).
4. Y. M. Lu, Y. B. He, B. Yang, A. Polity, N. Volbers, C. Neumann, D. Hasselkamp, and B. K. Meyer, Phys. Status Solidi C 3, 2895 (2006).
5. A. N. Banerjee, S. Kundo, and K. K. Chattopadhyay, Thin Solid Films 440, 5 (2003).
6. C. H. Ong and H. Gong, Thin Solid Films 445, 299 (2003).
7. N. Tsuboi, Y. Itoh, J. Ogata, S. Kobayashi, H. Shimizu, K. Kato, and F. Kaneko, J. Appl. Phys. 46, 351 (2007).
8. R. S. Yu, C. J. Lu, D. C. Tasi, S. C. Liang, and F. S. Shieu, J. Electrochem. Soc. 154, 838 (2007).
9. J. Cai and H. Gong, J. Appl. Phys. 98, 033707 (2005).
10. R. E. Stauber, J. D. Perkins, P. A. Parilla, and D. S. Ginley, Electrochem. Solid-State Lett. 2, 654 (1999).
11. D. S. Kim and S. Y. Choi, Phys. Status Solidi A 202, 167 (2005).
12. K. Yamaya, Y. Yamaki, H. Nakanishi, and S. Chichibu, Appl. Phys. Lett. 72, 235 (1998).
13. M. Sugiyama, A. Murayama, T. Imao, K. Saiki, H. Nakanishi, and S. F. Chichibu, Phys. Status Solidi A 203, 2882 (2006).
14. S. Masaki, H. Nakanishi, M. Sugiyama, and S. F. Chichibu, Phys. Status Solidi C 5, 3135 (2008).
15. S. F. Chichibu, T. Yoshida, T. Onuma, and H. Nakanishi, J. Appl. Phys. 91, 874 (2002).
16. T. Koyama, T. Onuma, and S. F. Chichibu, Appl. Phys. Lett. 83, 2973 (2003).
17. S. F. Chichibu, T. Ohmori, N. Shibata, and T. Koyama, Appl. Phys. Lett. 88, 161914 (2006).
18. H. Hosono and T. Kamiya, Ceramics 38, 825 (2003) (in Japanese).