Enhancement of light extraction efficiency via inductively coupled plasma etching of block copolymer templates on GaN/Al2o3

Electronic Materials Letters

Volumn 4, Issue 4, 2008, Pages 185-188

  Kim, Hong Yeol ^a   Kim, Taejoon ^a   Ahn, Jae Hui ^a   Shin, Kyusoon ^b   Bang, Joona ^a   Kim, Jihyun ^a  

^a Korea University   (South Korea)

^b Seoul National University   (South Korea)

Author keywords

Block copolymer thin films; GaN; Plasma etching; Self assembly

Indexed keywords

EID: 70349410553     PISSN: 17388090     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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