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Volumn 20, Issue 12, 2008, Pages 1003-1005
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A 5-μm-thick SOI waveguide with low birefringence and low roughness and optical interconnection using high numerical aperture fiber
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Author keywords
Optical waveguide components; Optical waveguides; Optoelectronic devices
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Indexed keywords
ATOMIC FORCE MICROSCOPES;
COMPLEX PROCESSING;
COUPLING LOSS;
HIGH NUMERICAL APERTURES;
LOW BIREFRINGENCE;
MODE SIZE CONVERTER;
OPTICAL INTERCONNECTIONS;
SILICON ON INSULATOR WAVEGUIDE;
THICK SOI;
BIREFRINGENCE;
ELECTROOPTICAL DEVICES;
OPTICAL INTERCONNECTS;
OPTOELECTRONIC DEVICES;
WAVEGUIDE COMPONENTS;
OPTICAL WAVEGUIDES;
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EID: 70349279468
PISSN: 10411135
EISSN: None
Source Type: Journal
DOI: 10.1109/LPT.2008.923754 Document Type: Article |
Times cited : (11)
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References (6)
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