A compact CMOS MEMS microphone with 66dB SNR

Digest of Technical Papers - IEEE International Solid-State Circuits Conference

Volumn , Issue , 2009, Pages

  Čitaković, Jelena ^a,b   Høvesten, Per F ^a   Rocca, Gino ^a   Van Halteren, Aart ^c   Rombach, Pirmin ^a   Stenberg, Lars J ^a   Andreani, Pietro ^d   Bruun, Erik ^b  

^a Pulse MEMS Division   (Denmark)

^b TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^c Pulse Advanced Acoustics   (Netherlands)

^d LUND UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 70349279078     PISSN: 01936530     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISSCC.2009.4977452     Document Type: Conference Paper

References (12)

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