Batron P-Si microsensor for methane and its derivatives

Sensors and Actuators, B: Chemical

Volumn 142, Issue 1, 2009, Pages 147-151

  Lein, G ^a   Paquette, S ^a   Vadhavkar, S ^a   Fuller, L ^b   Santhanam, K S V ^a  

^a ROCHESTER INSTITUTE OF TECHNOLOGY   (United States)

^b Rochester Institute of Technology   (United States)

Author keywords

Baytron P Si chip; Chlorinated methanes; Methane; Silicon wafer

Indexed keywords

AMBIENT TEMPERATURES; BAYTRON P; BAYTRON P-SI CHIP; BEFORE AND AFTER; CHLORINATED METHANES; ENVIRONMENTAL DETECTION; GAP REGIONS; GOLD PLATES; METHANE GAS; METHYLENE CHLORIDE; ROOM TEMPERATURE; SI CHIPS;

CARBON TETRACHLORIDE; DICHLOROMETHANE; METHANE; SEMICONDUCTING SILICON COMPOUNDS; SILICON;

SILICON WAFERS;

EID: 70349247685     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2009.07.047     Document Type: Article

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