Pull-in dynamics of variable-width electrostatic microactuators

2008 Proceedings of the 9th Biennial Conference on Engineering Systems Design and Analysis

Volumn 4, Issue , 2009, Pages 327-335

  Joglekar, Manish M ^a   Pawaskar, Dnyanesh N ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY BOMBAY   (India)

Author keywords

Dynamic pull in parameters; Energy technique; Nonprismatic microbeams; Pull in efficacy index

Indexed keywords

ACTUATION VOLTAGES; APPLIED VOLTAGES; BEAM GEOMETRY; CONVEX GEOMETRY; CRITICAL AMPLITUDES; ELECTROSTATIC MICROACTUATORS; ENERGY TECHNIQUE; FIXED-FIXED BEAMS; LOWER BOUNDS; MICRO BEAMS; MICRO DEVICES; MICRO-CANTILEVERS; MICROACTUATOR DESIGN; NONPRISMATIC MICROBEAMS; PULL-IN; PULL-IN EFFICACY INDEX; PULL-IN INSTABILITY; PULL-IN VOLTAGE; UPPER BOUND; WIDTH FUNCTION;

ACTUATORS; CONTROL THEORY; ELECTROSTATIC ACTUATORS; GEOMETRY; SYSTEMS ANALYSIS;

DESIGN;

EID: 70349137552     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (27)

1. Schiele, I., Huber, J., Hillerich, B., and Kozlowski, F., 1998. "Surface Micromachined Electrostatic Microrelay".Sensors and Atuators A, 66(1-3), pp. 345-354.
2. Mclntosh, R., Mauger, P., and Patterson, S., 2006. "Capacitive Transducers With Curved Electrodes". IEEE Sensors Journal, 6(1), pp. 125-138.
3. Gerlach-Meyer, U., 1991. "Micromachined Capacitive Accelerometer". Sensors and Atuators A, 27(1-3), pp. 565-569.
4. Sattler, R., Piotz, F., Fattinger, G., and Wachutka, G., 2002. "Modeling of an Electrostatic Torsional Actuator: Demonstrated with a RF MEMS Switch". Sensors and Atuators A, 97, pp. 337-346.
5. Rehman, E. A., Nayfeh, A., and Younis, M., 2003. "Dynamics of an Electrically Actuated Resonant Microsensor". Proceedings of the International Conference on MEMS NANO and Smart systems (ICMENS '03),IEEE, Canada.
6. Nemirovsky, Y., and Bochobza-Degani, O., 2001. "A Methodology and Model for the Pull-in Parameters of Electrostatic Actuators". Journal of Microelecromechanical Systems, 10(4), pp. 601-615.
7. Yang, F., 2002. "Electromechanical Instability of Microscale Structures". Journal of Applied Physics, 92(5), pp. 2789-2794.
8. Bifano, T, Perreault, J., Mali, R., and Horenstein, M., 1999. "Microelectromechanical Deformable Mirrors". IEEE Journal of Selected Topics in Quantum Electronics, 5(1), pp. 83-89.
9. Hung, E., and Senturia, S., 1999. "Extending The Travel Range of Analog-tuned Electrostatic Actuators". Journal of Microelectromechanical Systems, 8(4), pp. 497-505.
10. Castan̈er, L., Pons, J., Guardia, R., and Rodriguez, A., 2001. "Analysis of Extended Opertion Range of Electrostatic Actuators by Current Pulse Drive". Sensors and Actuators A, 90, pp. 181-190.
11. Chan, E., and Dutton, R., 2000. "Electrostatic Mi-cromechanical Actuator With Extended Range of Travel". Journal of Microelectromechanical Systems, 9(3), pp. 321-328.
12. Hung, E., and Senturia, S., 1999. "Generating Efficient Dynamical Models For Microelectromechanical Systems From a Few Finite-Element Simulation Runs". IEEE Journal Of Mlcroelectomechanical Systems, 8(3), pp. 280-289.
13. Joglekar, M., and Pawaskar, D., Feb. 2007. "Travel Range Extension of an Electrostatic Microactuator. Nonlinear Parallel Plate Models". Proceedings of the International Conference on Emerging Mechanical Technology: From Macro To Nano (EMTM2N 2007), BITS, Pilani, India, pp. 171-178.
14. Joglekar, M., and Pawaskar, D., Nov.2007. "An Efficient Numerical Scheme to Determine the Pull-in Parameters of an Electrostatic Microactuator With Contact Type Nonlinearity". Proceedings of 2007 ASME International Mechanical Engineering Congress and Exposition (IMECE 2007), Seattle, Washington.
15. Osterberg, P., and Senturia, S., 1997. "M-TEST: A Test Chip For MEMS Material Property Measurement Using Electrostatically Actuated Test Structures". Journal of Microelectromechanical Systems, 6(2), pp. 107-118.
16. Najar, F., Choura, S., Borgi, S., Rahman, E., and Nayfeh, A., 2005. "Modeling And Design of Variable Geometry Electrostatic Microactuators". Journal of Micromechanics Microengineering, 15, pp. 419-429.
17. Joglekar, M., and Pawaskar, D., Dec 2007. "Variable Width Electrostatic Microactuators With Extended Travel Range". Proceedings of 2007 MEMS Innovation Fest (MIF 2007), Bangalore, India, pp. 40-45.
18. Abdalla, M., Reddy, C, Faris, W., and Gurdal, Z., 2005. "Optimal Design of an Electrostatically Actuated Microbeam For Maximum Pull-in Voltage". Computers and Structures, 83, pp. 1320-1329.
19. Tilmans, H., Raedt, W., and Beyne, E., 2003. "MEMS For Wireless Communications: From RF Mems Components To RF MEMS SiP". Journal of Micromechanics Microengineering, 13, pp. S139-S163.
20. Nielson, G. N., and Barbastathis, G., 2006. "Dynamic Pull-in of Parallel-Plate and Torsional Electrostatic MEMS Actuators". Journal of Microelectromechanical Systems, 15(4), pp. 811-821.
21. Elata, D., 2005. "On The Static and Dynamic Response of Electrostatic Actuators". Bulletin of the Polish Academy of Sciences, 53(4), pp. 373-384.
22. Rochus, V, Rixen, D., and Golinval, J., 2005. "Electrostatic Coupling of MEMS Structures: Transient Simulations and Dynamic Pull-in". Nonlinear Analysis, 63, pp. 1619-1633.
23. Joglekar, M., Pawaskar, D., and Raghuvanshi, J., Nov. 2007. "Pull-in Dynamics of Nonlinear MEMS Oscillators". Proceedings of 2007 ISSS-MEMS, CEERl, Pilani, India.
24. Kuang, J., and Chen, C, 2005. "The Nonlinear Electrostatic Behavior For Shaped Electrode Actuators". International Journal of Mechanical Sciences, 47, pp. 1172-1190.
25. Najar, F., Choura, S., Borgi, S., Rahman, E., and Nayfeh, A., 2006. "Dynamic Analysis of Variable Geometry Electrostatic Microactuators". Journal of Micromechanics Microengineering, 16, pp. 2449-2457.
26. Elata, D., Bochobza-Degani O., and Nemirovsky, Y., 2003. "An efficient Adaptive Single-Mode Pull-In Extraction Algorithm for Computer Aided Design of Electrostatic MEMS Devices". Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, 1, pp. 464-467.
27. Chong, E., and Zak, S., 2001. An Introduction to Optimization, second ed. John Wiley & Sons, Inc.