A mems-based rate gyro based on parametric resonance

2008 Proceedings of the 9th Biennial Conference on Engineering Systems Design and Analysis

Volumn 2, Issue , 2009, Pages 793-797

  Miller, Nicholas J ^a   Shaw, Steven W ^a   Oropeza Ramos, Laura A ^b   Turner, Kimberly L ^b  

^a Michigan State University   (United States)

^b University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

A-PLANE; BASIC IDEA; CORIOLIS EFFECT; DRIVE MODE; MICRO ELECTRO MECHANICAL SYSTEM; PARAMETRIC RESONANCE; PROOF MASS; RATE GYRO; RATE RESPONSE; RESONANT RESPONSE; ROTATION RATE; SENSE MODE; TUNING PROBLEMS; TWO-DEGREE-OF-FREEDOM; WIDE FREQUENCY RANGE;

MACHINE DESIGN; MICROELECTROMECHANICAL DEVICES; MODEL STRUCTURES; SYSTEMS ANALYSIS;

GYROSCOPES;

EID: 70349108794     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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7. K. Turner, "Applications and analysis of parametric resonance in microelectromechanical systems," Phd thesis, Cornell University, 1999.
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9. A. Shkel, R. T. Howe, and R. Horowitz, "Modeling and simulation of micromachined gyroscopes in the presence of imperfections," Int. Conf. On Modelling and Simulation of Microsystems, 1999.
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