Investigation of polymer-bound PAGs: Synthesis, characterization and initial structure/property relationships of anion-bound resists

Journal of Photopolymer Science and Technology

Volumn 22, Issue 1, 2009, Pages 25-29

  Allen, Robert D ^a   Brock, Phillip J ^a   Na, Young Hye ^a   Sherwood, Mark H ^a   Truong, Hoa D ^a   Wallraff, Gregory M ^a   Fujiwara, Masaki ^a   Maeda, Kazuhiko ^b  

^a IBM ALMADEN RESEARCH CENTER   (United States)

^b CENTRAL GLASS CO LTD   (Japan)

Author keywords

EUV; PAG; Polymer bound PAGs

Indexed keywords

EID: 70249124229     PISSN: 09149244     EISSN: 13496336     Source Type: Journal    
DOI: 10.2494/photopolymer.22.25     Document Type: Article

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5. Diffusion and Distribution Studies of Photoacid Generators