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Volumn 42, Issue 13, 2009, Pages
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Fabrication of low-pressure field ionization gas sensor using bent carbon nanotubes
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Author keywords
[No Author keywords available]
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Indexed keywords
AS-GROWN;
DIFFERENT GEOMETRY;
ELECTRICAL CHARACTERISTIC;
FABRICATED SENSORS;
FIELD IONIZATION;
GAS SENSORS;
GROWTH PROCESS;
HIGH SENSITIVITY;
LOW PRESSURES;
MULTI-WALL CARBON NANOTUBES;
PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITION;
PRESSURE FIELD;
SILICON SUBSTRATES;
ACETYLENE;
CARBON NANOTUBES;
CHEMICAL SENSORS;
ELECTRIC FIELDS;
GAS DETECTORS;
GASES;
HYDROGEN;
LIGHTING;
MULTIWALLED CARBON NANOTUBES (MWCN);
PLASMA DEPOSITION;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
IONIZATION OF GASES;
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EID: 70149095446
PISSN: 00223727
EISSN: 13616463
Source Type: Journal
DOI: 10.1088/0022-3727/42/13/135502 Document Type: Article |
Times cited : (21)
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References (10)
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