Advances in small pixel, Large format α-Si bolometer arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7298, Issue , 2009, Pages

  Schimert, T ^a   Hanson, C ^a   Brady, J ^a   Fagan, T ^a   Taylor, M ^a   McCardel, W ^a   Gooch, R ^a   Gohlke, M ^a   Syllaios, A J ^a  

^a L 3 Communications Infrared Products ^*  (United States)

Author keywords

A Si; Amorphous silicon; Bolometer; Detector arrays; Infrared; Microbolometer; Thermal imaging; Uncooled

Indexed keywords

A-SI; DETECTOR ARRAYS; INFRARED; MICROBOLOMETER; THERMAL IMAGING; UNCOOLED;

ANALOG TO DIGITAL CONVERSION; BOLOMETERS; CANTILEVER BEAMS; INFRARED DETECTORS; INFRARED RADIATION; PHOTOLITHOGRAPHY; PIXELS; TEMPERATURE SENSORS;

AMORPHOUS SILICON;

EID: 69949181673     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.818576     Document Type: Conference Paper

References (0)