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Volumn 267, Issue 18, 2009, Pages 3032-3036
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Neutron radiation effects on metal oxide semiconductor (MOS) devices
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Author keywords
In situ; Ionization; MOS and neutron
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Indexed keywords
CURRENT GAINS;
DEUTERIUM-TRITIUM;
DEVICE PERFORMANCE;
ELECTRON HOLE PAIRS;
ELECTRONIC COMPONENT;
ENERGETIC RADIATION;
FUSION NEUTRONS;
IN SITU;
IN-CHANNELS;
IN-SITU METHODS;
INDUCED DAMAGE;
INSULATING LAYERS;
METAL OXIDE SEMICONDUCTOR;
MODERN MICROELECTRONICS;
MOS AND NEUTRON;
MOS STRUCTURE;
N-CHANNEL;
NEUTRON DISPLACEMENT;
NEUTRON FLUENCES;
NEUTRON RADIATION EFFECTS;
NEUTRON RADIATIONS;
OPERATING LIFE;
PERMANENT DAMAGE;
RECOIL ATOMS;
DEGRADATION;
DEUTERIUM;
EXCITONS;
FIELD EFFECT TRANSISTORS;
IONIZATION;
IONIZING RADIATION;
METALLIC COMPOUNDS;
MICROELECTRONICS;
MOS DEVICES;
NEUTRONS;
RADIATION EFFECTS;
SEMICONDUCTING SILICON;
SEMICONDUCTING SILICON COMPOUNDS;
SEMICONDUCTOR DEVICES;
SILICON OXIDES;
STRUCTURAL METALS;
TRITIUM;
NEUTRON IRRADIATION;
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EID: 69949178824
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.nimb.2009.06.051 Document Type: Article |
Times cited : (9)
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References (10)
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