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Volumn 25, Issue 18, 1986, Pages 3137-3140

Sinusoidal phase modulating interferometry for surface profile measurement

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EID: 69949166537     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.25.003137     Document Type: Article
Times cited : (233)

References (8)
  • 1
    • 84975645353 scopus 로고
    • Interference Phase Measurement
    • R. Crane, “Interference Phase Measurement, ” Appl. Opt. 8, 538 (1969).
    • (1969) Appl. Opt. , vol.8 , pp. 538
    • Crane, R.1
  • 3
    • 0018545702 scopus 로고
    • Real-Time Interferometer
    • K. D. Stumpf, “Real-Time Interferometer, ” Opt. Eng. 18, 648 (1979).
    • (1979) Opt. Eng. , vol.18 , pp. 648
    • Stumpf, K.D.1
  • 4
    • 0018922274 scopus 로고
    • Real-Time Digital Heterodyne Interferometry; a System
    • N. A. Massie, “Real-Time Digital Heterodyne Interferometry; a System, ” Appl. Opt. 19, 154 (1980).
    • (1980) Appl. Opt. , vol.19 , pp. 154
    • Massie, N.A.1
  • 5
    • 0021815465 scopus 로고
    • Measurement of Surface Topography of Magnetic Tapes by Mirau Interferometry
    • B. Bhushan, J. C. Wyant, and C. L. Koliopoulos, “Measurement of Surface Topography of Magnetic Tapes by Mirau Interferometry, ” Appl. Opt. 24, 1489 (1985).
    • (1985) Appl. Opt. , vol.24 , pp. 1489
    • Bhushan, B.1    Wyant, J.C.2    Koliopoulos, C.L.3
  • 6
    • 0019531992 scopus 로고
    • Optical Heterodyne Profilometry
    • G. E. Sommargren, “Optical Heterodyne Profilometry, ” Appl. Opt. 20, 610 (1981).
    • (1981) Appl. Opt. , vol.20 , pp. 610
    • Sommargren, G.E.1
  • 7
    • 0001265086 scopus 로고
    • Analysis of Measurement Accuracy in Sinusoidal Phase Modulating Interferometry
    • O. Sasaki and H. Okazaki, “Analysis of Measurement Accuracy in Sinusoidal Phase Modulating Interferometry, ” Appl. Opt. 25, 000 (1986), same issue.
    • (1986) Appl. Opt. , vol.25
    • Sasaki, O.1    Okazaki, H.2
  • 8
    • 0001703716 scopus 로고
    • Detection of Time-Varying Intensity Distribution with CCD Image Sensors
    • O. Sasaki and H. Okazaki, “Detection of Time-Varying Intensity Distribution with CCD Image Sensors, ” Appl. Opt. 24, 2124 (1985).
    • (1985) Appl. Opt. , vol.24 , pp. 2124
    • Sasaki, O.1    Okazaki, H.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.