SCOPUS 정보 검색 플랫폼

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7379, Issue , 2009, Pages

Progress of UV-NIL template making

(8) Hiraka, Takaaki a Mizuochi, Jun a Nakanishi, Yuko a Yusa, Satoshi a Sasaki, Shiho a Morikawa, Yasutaka a Mohri, Hiroshi a Hayashi, Naoya a

a DAI NIPPON PRINTING CO LTD (Japan)

Author keywords

Defects inspection; NIL; Resolution; Template

Indexed keywords

ACCELERATION VOLTAGES; DEFECT INSPECTION; HIGH RESOLUTION; INSPECTION TOOLS; LINE EDGE ROUGHNESS; LINE-AND-SPACE PATTERNS; MICRO-VISION; NIL; PATTERN GENERATION; PATTERNING TECHNOLOGY; PROGRAMMED DEFECT; RESOLUTION; RESOLUTION CAPABILITY; RESOLUTION IMPROVEMENT; RESOLUTION LIMITS; SPOT BEAMS; TEMPLATE; VARIABLE SHAPED BEAMS; WAFER-INSPECTION TOOLS;

DEFECTS; INSPECTION; INSPECTION EQUIPMENT; MACHINE TOOLS; NANOIMPRINT LITHOGRAPHY;

ELECTRON BEAM LITHOGRAPHY;

EID: 69949141723 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.824342 Document Type: Conference Paper

Times cited : (9)

References (5)

1
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- Progress of NIL template making
- S. Yusa, T. Hiraka, A. Kobiki, S. Sasaki, K. Itoh, N. Toyama, H. Mohri, N. Hayashi, "Progress of NIL template making", Proceeding of SPIE, Vol.6607, p. 66073H ,2007.
- (2007) Proceeding of SPIE , vol.6607
- Yusa, S.¹ Hiraka, T.² Kobiki, A.³ Sasaki, S.⁴ Itoh, K.⁵ Toyama, N.⁶ Mohri, H.⁷ Hayashi, N.⁸

2
- 42149192703
- UV-NIL template for the 22nm node and beyond
- T. Hiraka, S. Yusa, A. Fujii, S. Sasaki, K. Itoh, N. Toyama, M. Kurihara, H. Mohri, N. Hayashi, "UV-NIL template for the 22nm node and beyond", Proceeding of SPIE, Vol.6730, p.67305P , 2007.
- (2007) Proceeding of SPIE , vol.6730
- Hiraka, T.¹ Yusa, S.² Fujii, A.³ Sasaki, S.⁴ Itoh, K.⁵ Toyama, N.⁶ Kurihara, M.⁷ Mohri, H.⁸ Hayashi, N.⁹

3
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- Progress of NIL template making
- S. Yusa, T. Hiraka, J. Mizuochi, A. Fujii, Y. Sakai, K. Kuriyama, M. Sakaki, S. Sasaki, Y. Morikawa, H. Mohri, N. Hayashi, "Progress of NIL template making", Proceeding of EMLC2008, p.23-34, 2008.
- (2008) Proceeding of EMLC2008 , pp. 23-34
- Yusa, S.¹ Hiraka, T.² Mizuochi, J.³ Fujii, A.⁴ Sakai, Y.⁵ Kuriyama, K.⁶ Sakaki, M.⁷ Sasaki, S.⁸ Morikawa, Y.⁹ Mohri, H.¹⁰ Hayashi, N.¹¹

4
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- UV NIL mask making and imprint evaluation
- A. Fujii, Y. Sakai, J. Mizuochi, T. Hiraka, S. Yusa, K. Kuriyama, M. Sakaki, T. Sutou, S. Sasaki, Y. Morikawa, H. Mohri, N. Hayashi, "UV NIL mask making and imprint evaluation" , Proceeding of SPIE, Vol.7028, p.70281W, 2008.
- (2008) Proceeding of SPIE , vol.7028
- Fujii, A.¹ Sakai, Y.² Mizuochi, J.³ Hiraka, T.⁴ Yusa, S.⁵ Kuriyama, K.⁶ Sakaki, M.⁷ Sutou, T.⁸ Sasaki, S.⁹ Morikawa, Y.¹⁰ Mohri, H.¹¹ Hayashi, N.¹²

5
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- UV NIL template making and imprint evaluation
- S. Sasaki, T. Hiraka, J. Mizuochi, A. Fujii, Y. Sakai, T. Sutou, S. Yusa, K. Kuriyama, M. Sakaki, Y. Morikawa, H. Mohri, and N. Hayashi, "UV NIL template making and imprint evaluation", Proceeding of SPIE, Vol.7122, p. 71223P-1,
- Proceeding of SPIE , vol.7122
- Sasaki, S.¹ Hiraka, T.² Mizuochi, J.³ Fujii, A.⁴ Sakai, Y.⁵ Sutou, T.⁶ Yusa, S.⁷ Kuriyama, K.⁸ Sakaki, M.⁹ Morikawa, Y.¹⁰ Mohri, H.¹¹ Hayashi, N.¹²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.