Electrical and Mechanical characterization of low temperature co-fired ceramics for high temperature sensor applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7362, Issue , 2009, Pages

  Bienert, C ^a   Roosen, A ^a   Grosser, M ^b   Ziegler, M ^b   Schmid, U ^c  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

^b SAARLAND UNIVERSITY   (Germany)

^c VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

Electrical performance; Glass softening; High temperature behaviour; LTCC; Mechanical behaviour

Indexed keywords

AMORPHOUS PHASE; APPLICATION RANGE; CERAMIC MULTILAYER TECHNOLOGY; CRYSTALLIZATION PRODUCTS; DENSIFICATION MECHANISMS; ELECTRICAL PERFORMANCE; ELEVATED TEMPERATURE; GLASS CERAMIC COMPOSITES; GLASS MATRICES; HIGH TEMPERATURE BEHAVIOUR; HIGH TEMPERATURE SENSORS; HIGHLY INTEGRATED DEVICES; IN-SITU; INDUCTIVELY COUPLED PLASMA ANALYSIS; LIFETIME PREDICTION; LOW-TEMPERATURE CO-FIRED CERAMICS; LTCC; LTCC SUBSTRATES; MECHANICAL AND ELECTRICAL PROPERTIES; MECHANICAL BEHAVIOUR; MECHANICAL CHARACTERIZATIONS; METALLIZATIONS; MULTILAYER CERAMICS; SENSOR APPLICATIONS; SINGLE LAYER; SURFACE RESISTIVITY; TEMPERATURE DEPENDENCE; TEMPERATURE STABILITY; TEST PRODUCTS; THREE-POINT BENDING TEST; VISCOUS SINTERING; XRD;

ACTUATORS; BENDING TESTS; CERAMIC PRODUCTS; CRYSTAL RESONATORS; CRYSTALLIZATION; DYNAMIC POSITIONING; GLASS; GLASS CERAMICS; HIGH TEMPERATURE APPLICATIONS; INDUCTIVELY COUPLED PLASMA; MECHANICAL PROPERTIES; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MULTILAYERS; PERCOLATION (SOLID STATE); SILVER; SINTERING; SMART SENSORS; SUBSTRATES; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS;

ELECTRIC PROPERTIES;

EID: 69949135261     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.822665     Document Type: Conference Paper

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