Fabrication of ridge waveguides in LiNbO3 thin film crystal by proton-exchange accelerated etching

Electronics Letters

Volumn 45, Issue 18, 2009, Pages 940-941

  Takaoka, T ^a   Fujimura, M ^a   Suhara, T ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION METHOD; GUIDED MODES; PROTON-EXCHANGE; RIDGE WAVEGUIDES; WAVELENGTH CONVERSION;

ETCHING; FABRICATION; PROTONS;

WAVEGUIDES;

EID: 69549103264     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el.2009.1693     Document Type: Article

References (8)

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3. 3 pure crystal waveguide ', Electron. Lett., 2004, 40, p. 1359-1361 10.1049/el:20046010 0013-5194
4. Umeki, T.: et al. ' Highly efficient +5-dB parametric gain conversion using direct-bonded PPZnLN ridge waveguide ', IEEE Photonics Technol. Lett., 2008, 20, p. 15-17 1041-1135
5. Hu, H., Ricken, R., Sohler, W., and Wehrspohn, R.B.: ' Lithium niobate ridge waveguides fabricated by wet etching ', IEEE Photonics Technol. Lett., 2007, 19, p. 417-419 10.1109/LPT.2007.892886 1041-1135
6. Lee, H.J., and Shin, S.-Y.: ' Lithium niobate ridge waveguides fabricated by wet etching ', Electron. Lett., 1995, 31, p. 268-269 0013-5194
7. 3 waveguides buried by reverse proton exchange ', Jpn. J. Appl. Phys., 2004, 43, p. L1543-L1545 0021-4922
8. Laurell, F., Webjörn, J., Arvidsson, G., and Holmberg, J.: ' Wet etching of proton-exchanged lithium niobate - a novel processing technique ', J. Lightwave Technol., 1992, 10, p. 1606-1609 0733-8724