Evaluation of fuzzy neural network run-to-run controller using numerical simulation analysis for SISO process

Expert Systems with Applications

Volumn 36, Issue 10, 2009, Pages 12044-12048

  Wang, Chien Chih ^a   Jiang, Bernard C ^b   Wu, Ming Yih ^b   Jen, Chih Hung ^c  

^a MING CHI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^b YUAN ZE UNIVERSITY   (Taiwan)

^c LUNGHWA UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Adaptive EWMA; EWMA; FNN; Large autoregressive

Indexed keywords

ADAPTIVE EWMA; ANALYSIS RESULTS; AUTO-REGRESSIVE; CONTROL METHODS; CONTROL STRATEGIES; ENGINEERING PROCESS CONTROL; EWMA; EWMA CONTROL; FNN; FNN CONTROLLERS; LARGE AUTOREGRESSIVE; NUMERICAL SIMULATION; PROCESS CONTROL MODELS; PROCESS OUTPUT; R2R CONTROL; RESPONSE SURFACE MODELING; RUN-TO-RUN CONTROL; RUN-TO-RUN CONTROLLER; SEMICONDUCTOR MANUFACTURING PROCESS; SINGLE-INPUT SINGLE-OUTPUT;

COMPUTER SIMULATION LANGUAGES; CONTROLLERS; FUZZY NEURAL NETWORKS; QUALITY CONTROL; SEMICONDUCTOR DEVICE MANUFACTURE; SIMULATORS;

STATISTICAL PROCESS CONTROL;

EID: 69249235513     PISSN: 09574174     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.eswa.2009.03.011     Document Type: Article

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