Orientation controlled deposition of Pb(Zr,Ti)O3 films using a micron-size patterned SrRuO3 buffer layer

Journal of Materials Science

Volumn 44, Issue 19, 2009, Pages 5339-5344

  Nishida, Ken ^a   Yamamoto, Takashi ^a   Osada, Minoru ^b   Sakata, Osami ^c   Kimura, Shigeru ^c   Saito, Keisuke ^d   Nishide, Masamichi ^e   Katoda, Takashi ^e   Yokoyama, Shintaro ^f   Funakubo, Hiroshi ^f  

^a NATIONAL DEFENSE ACADEMY   (Japan)

^b NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^c JAPAN SYNCHROTRON RADIATION RESEARCH INSTITUTE   (Japan)

^d BRUKER AXS INC   (United States)

^e KOCHI UNIVERSITY OF TECHNOLOGY   (Japan)

^f TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR; CONTROLLED DEPOSITION; DOT PATTERNS; FERROELECTRIC PROPERTY; METAL MASKS; METAL ORGANIC; MOCVD; PB(ZR ,TI)O; PZT; PZT FILM; SI SUBSTRATES; X- RAY DIFFRACTION;

BUFFER LAYERS; CHEMICAL VAPOR DEPOSITION; CRYSTAL ORIENTATION; FILM PREPARATION; LEAD; ORGANIC CHEMICALS; ORGANOMETALLICS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; PLATINUM; RAMAN SCATTERING; RAMAN SPECTROSCOPY; SEMICONDUCTING LEAD COMPOUNDS; ZIRCONIUM;

SUBSTRATES;

EID: 68949191023     PISSN: 00222461     EISSN: 15734803     Source Type: Journal    
DOI: 10.1007/s10853-009-3683-5     Document Type: Article

References (16)

1. JF Scott CAP de Araujo 1989 Science 246 1400
2. O Auciello JF Scott R Ramesh 1989 Phys Today 51 22
3. P Muralt 2000 J Micromech Microeng 10 136
4. SM Spearing 2000 Acta Mater 48 179
5. S Yokoyama K Takahashi S Okamoto A Nagai J Minamidate K Saito N Ohashi H Haneda O Sakata S Kimura K Nishida T Katoda H Funakubo 2006 Jpn J Appl Phys 45 5102
6. K Takahashi T Oikawa K Saito S Kaneko H Fujisawa M Shimizu H Funakubo 2002 Jpn J Appl Phys 41 5376
7. S Yokoyama T Ozeki T Oikawa H Funakubo 2002 Jpn J Appl Phys 41 6705
8. O Sakata Y Furukawa S Goto T Mochizuki T Uruga K Takeshima H Ohashi T Ohata T Matsushita S Takahashi H Tajiri T Ishikawa M Nakamura M Ito K Sumitani T Takahashi T Shimura A Saito M Takahashi 2003 Surf Rev Lett 10 543
9. S Yokoyama T Ozeki T Oikawa H Funakubo 2003 Integ Ferro 59 1429
10. S-H Lee HM Jang HH Sung H Yi 2002 Appl Phys Lett 81 2439
11. S-H Lee HM Jang SM Cho G-C Yi 2002 Appl Phys Lett 80 3165
12. R Loudon 1964 Adv Phys 13 423
13. L Merten 1968 Phys Status Solidi B 25 125
14. K Nishida M Osada S Wada S Okamoto R Ueno H Funakubo T Katoda 2005 Jpn J Appl Phys 44 L827
15. H Okamoto G Asano T Oikawa K Saito H Funakubo 2003 Appl Phys Lett 82 4761
16. M Osada K Nishida S Wada S Okamoto R Ueno H Funakubo T Katoda 2005 Appl Phys Lett 87 232902