A bidirectional standing wave ultrasonic linear motor based on Langevin bending transducer

Ferroelectrics

Volumn 350, Issue 1, 2007, Pages 102-110

  Chen, Wei Shan ^a   Shi, Sheng Jun ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Bending standing wave; FEM; Langevin bending transducer; Piezoceramics; Ultrasonic linear motor

Indexed keywords

FEM; LANGEVIN; PIEZO-CERAMICS; STANDING WAVE; ULTRASONIC LINEAR MOTOR;

CRYSTALLOGRAPHY; DENTISTRY; ELASTIC WAVES; FINITE ELEMENT METHOD; MOTORS; TRANSDUCERS; ULTRASONICS; VIBRATION ANALYSIS; WAVES;

LINEAR MOTORS;

EID: 68849117059     PISSN: 00150193     EISSN: 15635112     Source Type: Journal    
DOI: 10.1080/00150190701369958     Document Type: Conference Paper

References (13)

1. S. Ueha and Y. Tomikawa, Ultrasonic motors. UK: Oxford University Press, 1993.
2. T. Sashida and T. Kenjo, An introduction to ultrasonic motors. UK: Oxford University Press, 1993.
3. T. Kunioka, Y. Takeda, T. Matsuda, N. Shimazu, and Y. Nakayama, XY Stage driven by ultrasonic linear motors for the electron-beam X-ray mask writer EB-X3. J. Vac. Sci. Technol B. 17, 2917-2920 (1999).
4. Y. Egashira, K. Kosaka, T. Iwabuchi, T. Kosaka, and T. Baba, Sub-nanometer resolution ultrasonic motor for 300 mm wafer lithography precision stage. Jpn. J. Appl. Phys. 41, 5858-5863 (2002).
5. S. Y. He, W. S. Chen, X. Tao, and Z. L. Chen, Standing wave Bi-directional linearly moving ultrasonic motor. IEEE Trans. Ultrason., Ferroelect., Freq. Contr. 45, 1133-1138 (1998).
6. Y. Roh and J. Kwon, Development of a new standing wave type ultrasonic linear motor. Sens. Actuators A. 112, 196-202 (2004).
7. Y. Roh, S. Lee, and W. Han, Design and fabrication of a new traveling wave-type ultrasonic linear motor. Sens. Actuators A. 94, 205-210 (2001).
8. R. C. Ibrahim, A novel linear piezoelectric motor with complex vibration modes. Ferroelectrics 338, 65-72 (2006).
9. M. K. Kurosawa, O. Kodaira, Y. Tsuchitoi, and T. Higuchi, Transducer for high speed and large thrust ultrasonic linear motor using two sandwich-type vibrators. IEEE Trans. Ultrason., Ferroelect., Freq. Contr. 45, 1188-1195 (1998).
10. C. H. Yun, T. Ishii, K. Nakamura, S. Ueha, and K. Akashi, A high power ultrasonic linear motor using a longitudinal and bending hybrid bolt-clamped Langevin type transducer. Jpn. J. Appl. Phys. 40, 3773-3776 (2001).
11. M. K. Kurosawa, State-of-the-art surface acoustic wave linear motor and its future applications. Ultrasonics 38, 15-19 (2000).
12. B. Zhai, S. P. Lim, and K. H. Lee, A modified ultrasonic linear motor. Sens. Actuators A. 86, 154-158 (2000).
13. ANSYS User's Documentation: Theory Reference-Coupling 2004.