Fabrication of thick metal absorber with overhanging structure for TESs

IEEE Transactions on Applied Superconductivity

Volumn 19, Issue 3, 2009, Pages 469-472

  Lee, Young Hwa ^a   Bae, Jai Beom ^a   Kim, Il Hwan ^a   Kim, Yong Hamb ^a   Lee, Hwa Yong ^a   Lee, Kyoung Beom ^a   Lee, Min Kyu ^a   Lee, Sang Jun ^a  

^a Korea Research Institute of Standards and Science   (South Korea)

Author keywords

Au absorber; Superconducting transition edge sensor (TES); X ray detector

Indexed keywords

AU ABSORBER; BI-LAYER; DETECTION EFFICIENCY; ELECTRICAL CONTACTS; FILLING FACTOR; MUSHROOM STRUCTURE; NEGATIVE PHOTORESISTS; PHOTORESIST PATTERNS; SEED LAYER; SENSITIVITY PARAMETERS; SUPERCONDUCTING TRANSITION EDGE SENSOR (TES); THICK LAYERS; X-RAY DETECTOR;

NANOSENSORS; PHOTORESISTORS; PHOTORESISTS; STRUCTURAL METALS; SUPERCONDUCTING TRANSITION TEMPERATURE; SUPERCONDUCTIVITY; SURFACE TREATMENT; X RAY APPARATUS;

GOLD;

EID: 68749116247     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASC.2009.2019565     Document Type: Conference Paper

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