Stress distribution and hillock formation in Au/Pd thin films as a function of aging treatment in capacitor applications

Applied Surface Science

Volumn 255, Issue 22, 2009, Pages 8995-8999

  Nazarpour, S ^a   Jambois, O ^a   Zamani, C ^a   Afshar, F ^a   Cirera, A ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Au Pd thin film; Grain boundary scattering; Hillock formation

Indexed keywords

BINARY ALLOYS; ELECTRIC CONDUCTIVITY; GOLD ALLOYS; GRAIN BOUNDARIES; PALLADIUM ALLOYS;

AGING TREATMENT; DENSITY OF DISLOCATION; GRAIN BOUNDARY SCATTERING; HILLOCK FORMATION; SUBSTRATE RELAXATION; TRIPLE JUNCTION;

THIN FILMS;

EID: 68649115703     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2009.06.077     Document Type: Article

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