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Volumn 311, Issue 17, 2009, Pages 4167-4170
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Reducing dislocation density in GaN films using a cone-shaped patterned sapphire substrate
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Author keywords
A1. Threading dislocation; A1. Transmission electron microscope (TEM); B1. Gallium Nitride; B1. Patterned sapphire substrate (PSS)
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Indexed keywords
A1. THREADING DISLOCATION;
A1. TRANSMISSION ELECTRON MICROSCOPE (TEM);
B1. GALLIUM NITRIDE;
B1. PATTERNED SAPPHIRE SUBSTRATE (PSS);
DISLOCATION DENSITIES;
GAN BASED LED;
GAN FILM;
GAN LAYERS;
GROWTH STAGES;
HRTEM IMAGES;
INCOHERENCY;
LATERAL OVERGROWTH;
LATTICE DISTORTIONS;
METALORGANIC CHEMICAL VAPOR DEPOSITION;
NUCLEATION STAGES;
PATTERNED SAPPHIRE SUBSTRATE;
RESIDUAL STRAINS;
SAPPHIRE SUBSTRATES;
STRAIN MAPPING;
TEM;
THREADING DISLOCATION;
CORUNDUM;
ELECTRON MICROSCOPES;
GALLIUM NITRIDE;
LATTICE MISMATCH;
LIGHT TRANSMISSION;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
ORGANIC CHEMICALS;
ORGANOMETALLICS;
SAPPHIRE;
SEMICONDUCTING GALLIUM;
SEMICONDUCTOR QUANTUM WIRES;
SUBSTRATES;
TRANSMISSION ELECTRON MICROSCOPY;
GALLIUM ALLOYS;
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EID: 68549136628
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jcrysgro.2009.07.023 Document Type: Article |
Times cited : (79)
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References (13)
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