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Volumn 267, Issue 16, 2009, Pages 2583-2585
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Novel Floating Low-Energy Ion Gun for the storing matter instrument
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Author keywords
Floating Low Energy Ion Gun (FLIG); Low energy ion bombardment
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Indexed keywords
BEAM CURRENTS;
FLOATING-LOW ENERGY ION GUN (FLIG);
IMPACT ENERGY;
LOW ENERGY ION BEAM;
LOW-ENERGY ION BOMBARDMENT;
LOW-ENERGY ION GUN;
RESOLUTION ANALYSIS;
SAMPLE SURFACE;
SPOT DIAMETER;
WIEN FILTERS;
BEAM PLASMA INTERACTIONS;
ELECTRON OPTICS;
ELECTROSTATIC LENSES;
ION BEAMS;
ION SOURCES;
IONS;
LENSES;
XENON;
ION BOMBARDMENT;
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EID: 68549130652
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.nimb.2009.05.045 Document Type: Article |
Times cited : (8)
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References (3)
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