Normal stiffness calibration of microfabricated tri-layer conducting polymer actuators

Smart Materials and Structures

Volumn 18, Issue 6, 2009, Pages

  Alici, Gursel ^a   Higgins, Michael J ^a  

^a UNIVERSITY OF WOLLONGONG   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

AFM CANTILEVERS; ATOMIC FORCE MICROSCOPES; CALIBRATION METHOD; CLEANROOM FACILITIES; DEFORMABLE MATERIAL; ELECTRICAL CONTACTS; ELECTROACTIVE; HIGH THROUGHPUT; MECHANICAL MODELING; MICRO-CANTILEVERS; MICROCANTILEVER BEAMS; MICROFABRICATED; NONAQUEOUS MEDIA; NORMAL FORCES; NORMAL STIFFNESS; POLYMER ACTUATORS; SPRING CONSTANTS; SPRING METHODS; STIFFNESS CHARACTERIZATION; STIFFNESS CONSTANTS; STIFFNESS VALUES;

ATOMIC FORCE MICROSCOPY; CALIBRATION; COMPOSITE MICROMECHANICS; CONDUCTIVE PLASTICS; EXCIMER LASERS; GAS LASERS; LASER ABLATION; MICROACTUATORS; MICROFABRICATION; ORGANIC CONDUCTORS; POLYPYRROLES; PULSED LASER DEPOSITION; STIFFNESS; THROUGHPUT;

CONDUCTING POLYMERS;

EID: 68549085477     PISSN: 09641726     EISSN: 1361665X     Source Type: Journal    
DOI: 10.1088/0964-1726/18/6/065013     Document Type: Article

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