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Volumn 19, Issue 5, 2009, Pages

A reusable micromechanical energy storage/quick release system with assembled elastomers

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY STORAGE SYSTEMS; FORCE GAUGES; FULLY INTEGRATED; INCHWORM MOTORS; LASER-CUT; MICRO-MECHANICAL; PROBE TIPS; RECOVERED ENERGY; SILICON MICROSTRUCTURES; SILICON-ON-INSULATOR PROCESS; STORED ENERGY;

EID: 68249153838     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/5/055009     Document Type: Article
Times cited : (13)

References (19)
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    • Rose, C.1    Wright, G.2
  • 5
    • 0031224250 scopus 로고    scopus 로고
    • The mechanical properties of the rubber elastic polymer polydimethylsiloxane for sensor applications
    • Lotters J C, Olthuis W, Veltink P H and Bergveld P 1997 The mechanical properties of the rubber elastic polymer polydimethylsiloxane for sensor applications J. Micromech. Microeng. 7 145-7
    • (1997) J. Micromech. Microeng. , vol.7 , pp. 145-147
    • Lotters, J.C.1    Olthuis, W.2    Veltink, P.H.3    Bergveld, P.4
  • 6
    • 22444436644 scopus 로고    scopus 로고
    • A single-layer PDMS-on-silicon hybrid microactuator with multi-axis out-of-plane motion capabilities - Part I: Design and analysis
    • DOI 10.1109/JMEMS.2005.844761
    • Tung Yi-C and Kurabayashi K 2005 A single-layer pdms-on-silicon hybrid microactuator with multi-axis out-of-plane motion capabilities: Part 1. design and analysis J. Microelectromech. Syst. 14 548-57 (Pubitemid 41005074)
    • (2005) Journal of Microelectromechanical Systems , vol.14 , Issue.3 , pp. 548-557
    • Tung, Y.-C.1    Kurabayashi, K.2
  • 7
    • 0000453651 scopus 로고
    • Energy storage in jumping insects
    • (Amsterdam: Elsevier)
    • Bennet-Clark H C 1976 Energy storage in jumping insects The Insect Integument (Amsterdam: Elsevier) pp 421-443
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  • 9
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    • 6.777j/2.751j Material Property Database
    • 6.777j/2.751j Material Property Database 2007 http://web.mit.edu/6.777/ www/matprops/pdms.htm
    • (2007)
  • 10
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    • Vitek coatings-parylene coatings
    • Vitek coatings-parylene coatings 2007 http://www.vitekres.com/ vitekparylene.htm
    • (2007)
  • 11
    • 0025698148 scopus 로고
    • Application of electric microactuators to silicon micromechanics
    • Mahadevan R, Mehregany M and Gabriel K J 1990 Application of electric microactuators to silicon micromechanics Sensors Actuators A A21-A23 219-25
    • (1990) Sensors Actuators , vol.21-23 , pp. 219-225
    • Mahadevan, R.1    Mehregany, M.2    Gabriel, K.J.3
  • 12
    • 5244266958 scopus 로고
    • Howard M.J.(San Diego, CA: The International Plastics Selector)
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  • 14
    • 0036686315 scopus 로고    scopus 로고
    • Single mask, large force, and large displacement electrostatic linear inchworm motors
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  • 15
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    • Suzuki Y and Tai Y-C 2006 Micromachined high-aspect-ratio parylene spring and its application to low-frequency accelerometers J. Microelectromech. Syst. 15 1364-70
    • (2006) J. Microelectromech. Syst. , vol.15 , pp. 1364-1370
    • Suzuki, Y.1    Tai, Y-C.2
  • 17
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    • Out of plane motion of assembled microstructures using single-mask soi process
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.