External linearisation of a MEMS electrothermal scanner with application in a confocal microscope

Micro and Nano Letters

Volumn 4, Issue 2, 2009, Pages 106-111

  Poland, S P ^a   Girkin, J M ^b   Li, L ^a   Uttamchandani, D ^a  

^a UNIVERSITY OF STRATHCLYDE   (United Kingdom)

^b DURHAM UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CM TECHNIQUES; CONFOCAL MICROSCOPES; DRIVE SIGNAL; LINEARISATION; LOOK-UP-TABLE; MECHANICAL RESPONSE; MEMS SCANNER; OPTICAL MICROSCOPES; OPTICAL SCANNERS; RANDOM SEARCH ALGORITHM; TWO-AXIS;

LASER RECORDING; LEARNING ALGORITHMS; LIGHT TRANSMISSION; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSCOPES;

SCANNING;

ALGORITHM; ARTICLE; DECOMPOSITION; FOURIER TRANSFORMATION; IONOSPHERIC INTERFERENCE; LORAN C RECEIVER; SIGNAL PROCESSOR; WAVEFORM;

EID: 68149126391     PISSN: None     EISSN: 17500443     Source Type: Journal    
DOI: 10.1049/mnl.2009.0018     Document Type: Article

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