A study of the gas specificity of porous silicon sensors for organic vapours

Materials Science- Poland

Volumn 27, Issue 2, 2009, Pages 603-610

  Choi, S H ^a   Cheng, H ^a   Park, S H ^a   Kim, H J ^a   Kim, Y Y ^a   Lee, K W ^a  

^a Kongju National University   (South Korea)

Author keywords

Gas sensor; Gas specificity; Porous silicon; Response pattern

Indexed keywords

CONSTANT VOLTAGE; CRYSTALLINE SILICONS; DETECTION SIGNAL; ELECTRICAL RESISTANCES; ELECTROCHEMICAL ANODIZATIONS; ETHANOL SOLUTIONS; GAS CHAMBERS; GAS SENSOR; P-TYPE; POROUS SILICON LAYERS; RESPONSE PATTERN;

ELECTRIC POTENTIAL; ETHANOL; GAS DETECTORS; HYDROFLUORIC ACID; SILICON SENSORS; VAPORS;

POROUS SILICON;

EID: 68149112290     PISSN: 01371339     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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