MEMS-technology for large-scale, multichannel ecog-electrode array manufacturing

IFMBE Proceedings

Volumn 22, Issue , 2008, Pages 2413-2416

  Rubehn, Birthe ^a   Fries, P ^b   Stieglitz, T ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

^b RADBOUD UNIVERSITY NIJMEGEN   (Netherlands)

Author keywords

MEMS; MicroECoG; Multielectrode array; Neural implant; Polyimide; Recording

Indexed keywords

ELECTROCORTICOGRAM; ELECTRODE ARRAYS; ELECTRODE IMPEDANCE; ELECTRODE SITES; MICROECOG; MICROMACHINED; MICROMETER RANGES; MINNEAPOLIS; MULTI-CHANNEL; MULTIELECTRODE ARRAYS; NEURAL IMPLANTS; ON-WAFER; RECORDING;

ELECTROCHEMICAL CORROSION; ELECTROCHEMICAL IMPEDANCE SPECTROSCOPY; ELECTROPHYSIOLOGY; PLATINUM; POLYIMIDES;

ELECTROCHEMICAL ELECTRODES;

EID: 67849132867     PISSN: 16800737     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1007/978-3-540-89208-3_579     Document Type: Conference Paper

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