Influence of RF plasma reactor setup on carboxylated hydrocarbon coatings

Plasma Processes and Polymers

Volumn 6, Issue 2, 2009, Pages 119-125

  Körner, Enrico ^a   Fortunato, Giuseppino ^a   Hegemann, Dirk ^a  

^a SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

Author keywords

Deposition; Nanocomposites; Oxidation; Plasma polymerization; Sputtering

Indexed keywords

AG ELECTRODE; CONSTANT PRESSURES; ENERGY INPUTS; GAS RATIO; LOW PRESSURES; PLASMA CONDITIONS; PLASMA POLYMER COATINGS; POWER INPUT; RF PLASMA; SPUTTERING CONDITIONS; XPS;

DEPOSITION RATES; FUNCTIONAL POLYMERS; HYDROCARBONS; NANOCOMPOSITES; OPTICAL FILTERS; OXIDATION; PLASMA POLYMERIZATION; PLASMA SHEATHS; PLASMA THEORY; PLASTIC COATINGS; POLYMERS; SILVER; WAVE PLASMA INTERACTIONS;

PLASMA DEPOSITION;

EID: 67651222436     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200800102     Document Type: Article

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